Courses

MEMS 1 (ENME 489F/808K)

This course is taught every Fall and is open to both undergraduate and graduate students in all engineering and science departments. I will not be teaching it in Fall 2008; it will be taught by Prof. DeVoe. The description below is only for the course as I teach it. This course presents a broad overview of micro-electro-mechanical systems (MEMS) and microfabrication technologies. Both traditional and emerging microfabrication techniques for microsensors, microactuator, and nanotechnology are introduced. (3 credits) There are 2.5 hours of lecture per week, plus 4 required labs of 2-3 hours each spread throughout the semester (every 3 weeks); the labs are taught in the teaching laboratory of the Nanocenter’s FabLab in the Kim Building. This is a demanding course aimed at students who would like to either get a job in the MEMS field or to continue on to graduate school in this area.

Topics covered include the following:

• Introduction to transducers and markets.
• MEMS fabrication processes and materials, including bulk micromachining, wet etching, dry etching, surface micromachining, sacrificial layers, film deposition, bonding, and non-traditional micromachining.
• Introduction to the relevant solid state physics, including crystal lattices, band structure, semiconductors, and doping.
• In the laboratory, students fabricate a cantilever beam. The laboratory covers safety, photolithography, profilometry, and wet etching.

For further information, see:

A short version of the syllabus for Fall 2007.

MEMS 2 (ENME 489G/808L, no longer offered)

In this course, students fabricated the devices they designed in MEMS 1. This gave students hands-on experience in the clean room with a variety of fabrication techniques and equipment.

For further information, see:

A short version of the syllabus for Spring 2007.

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Courses

MEMS 1 (ENME 476/808K, was ENME 489F)

MEMS 2 (ENME 489G/808L, no longer offered)

Statistics (ENME 392)

Additional Resources

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Syllabus Downloads in .doc format

ENME 392

ENME 489F/808K

ENME 489G/808L